Repairing the filament of IS40 ion source | SPMwiki

The IS40 ion source from prevac is used for sputtering sample in UHV. The detailed description of IS40 could be found here.

The filament of IS40 would be damaged if operating at wrong conditions. And we need to replace or repair( if possible) it to make the ion source work again. Here are some pictures of the filament resoldering process recorded in our lab.(Operated by Zhe Li)

If you find an overload resistance between Pin1 and pin3, the filament inside the ion source may be broken.

Then you need to vent the system and take the ion source out of the chamber.

Remove the copper cover

Look from the bottom of the ion source and find these two screws which marked by the red arrows. Loosen the nuts and remove the cover from the top. Then you will see the filament kit inside

To take out the filament, you need to unscrew two nuts on the top and another two bolts from the side.

Take out the filament kit carefully and resolder the filament by spot-welder. The red arrow indicates the broken part of the filament.

Note:

After finishing repairing, check the resistance again and put it back inside the ion source as carefully as you can.
Ordering a new filament kit from Prevac is highly recommended if the repaired one damaged frequently.

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